Title: 砷離子佈植砷化鎵的特性研究
Characterization of Arsenic Ion Implanted GaAs
Authors: 張振雄
CHANG CHEN-SHIUNG
國立交通大學光電工程研究所
Keywords: 砷化鎵;非晶質;深能階缺陷;薄膜;GaAs;Amorphous;Deep level trap;Thin film
Issue Date: 1996
Gov't Doc #: NSC85-2215-E009-064
URI: http://hdl.handle.net/11536/96120
https://www.grb.gov.tw/search/planDetail?id=234693&docId=43086
Appears in Collections:Research Plans