標題: | Multiparadigm modeling for hybrid dynamic systems using a Petri net framework |
作者: | Lee, Jin-Shyan Zhou, MengChu Hsu, Pau-Lo 電機資訊學士班 Undergraduate Honors Program of Electrical Engineering and Computer Science |
關鍵字: | automated manufacturing systems;hybrid dynamic systems (HDSs);multiparadigm modeling (MPaM);Petri nets (PNs);semiconductor manufacturing |
公開日期: | 1-Mar-2008 |
摘要: | Recently, modeling and simulation of hybrid dynamic systems (HDSs) have attracted much attention. However, since simultaneously dealing with the discrete and continuous variables is very difficult, most of the models result in a unified but more complicated and unnatural format. Moreover, design engineers cannot be allowed to use their preferred domain models. Based on the multiparadigm modeling concept, this correspondence proposes a Petri net framework with associated state equations to model the HDSs. In the presented approach, modeling schemes of the hybrid systems are separated but combined in a hierarchical way through specified interfaces. Designers can still work in their familiar domain-specific modeling paradigms, and the heterogeneity is hidden when composing large systems. An application to a rapid thermal process in semiconductor manufacturing is provided to demonstrate the practicability of the developed approach. |
URI: | http://dx.doi.org/10.1109/TSMCA.2007.914747 http://hdl.handle.net/11536/9617 |
ISSN: | 1083-4427 |
DOI: | 10.1109/TSMCA.2007.914747 |
期刊: | IEEE TRANSACTIONS ON SYSTEMS MAN AND CYBERNETICS PART A-SYSTEMS AND HUMANS |
Volume: | 38 |
Issue: | 2 |
起始頁: | 493 |
結束頁: | 498 |
Appears in Collections: | Articles |
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