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dc.contributor.author葉清發en_US
dc.date.accessioned2014-12-13T10:39:21Z-
dc.date.available2014-12-13T10:39:21Z-
dc.date.issued1995en_US
dc.identifier.govdocNSC84-2215-E009-054zh_TW
dc.identifier.urihttp://hdl.handle.net/11536/96391-
dc.identifier.urihttps://www.grb.gov.tw/search/planDetail?id=172143&docId=29236en_US
dc.description.sponsorship行政院國家科學委員會zh_TW
dc.language.isozh_TWen_US
dc.title低溫液相沈積二氧化矽薄膜之研究發展zh_TW
dc.titleInvestigations and Developments Room-Temperature Liquid-Phase Deposition of SiO/sub 2/ Filmen_US
dc.typePlanen_US
dc.contributor.department國立交通大學電子工程研究所zh_TW
Appears in Collections:Research Plans