多軸觸覺市式感測器之研究(III)

標題:	多軸觸覺市式感測器之研究(III) A Study of Multi-Axial Tactile Sensor (III)
作者:	黃宇中 HUANG YU-CHUNG 交通大學電子工程系
關鍵字:	多軸觸覺式感測器;微機電系統;塊狀微加工;壓阻式;Multi-axial tactile sensor;MEMS;Bulk micromachining;Piezoresistive
公開日期:	2000
官方說明文件#:	NSC89-2215-E009-035
URI:	http://hdl.handle.net/11536/98928 https://www.grb.gov.tw/search/planDetail?id=542984&docId=99827
Appears in Collections:	Research Plans

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