Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 林清發 | en_US |
| dc.contributor.author | LIN TSING-FA | en_US |
| dc.date.accessioned | 2014-12-13T10:51:45Z | - |
| dc.date.available | 2014-12-13T10:51:45Z | - |
| dc.date.issued | 2000 | en_US |
| dc.identifier.govdoc | NSC89-2212-E009-078 | zh_TW |
| dc.identifier.uri | http://hdl.handle.net/11536/102869 | - |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=549676&docId=101492 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.language.iso | zh_TW | en_US |
| dc.title | 12吋矽晶圓半導體CVD製程設備及BST介電薄膜成長研究---總計畫 (I) | zh_TW |
| dc.title | Research and Development of CVD Process Equipment for a 12-inch Single Silicon Wafer and Growth of BST Dielectric Thin Film(I) | en_US |
| dc.type | Plan | en_US |
| dc.contributor.department | 國立交通大學機械工程研究所 | zh_TW |
| Appears in Collections: | Research Plans | |
