| 標題: | Flexible non-volatile memory |
| 作者: | Liu Po-Tsun Fan Yang-Shun |
| 公開日期: | 18-三月-2014 |
| 摘要: | A manufacturing method for manufacturing a flexible non-volatile memory is provided. The manufacturing method comprises the steps outlined below. A flexible substrate is provided. A planarization layer is formed on the flexible substrate. A metal bottom electrode layer is deposited on the planarization layer. A mask is formed to define a plurality of patterns. An AZTO layer having a plurality of electrically independent AZTO cells is deposited on the metal bottom electrode layer corresponding to the patterns. A top electrode layer is deposited on the AZTO layer corresponding to the AZTO cells to form a plurality of non-volatile memory cells. |
| 官方說明文件#: | H01L021/20 |
| URI: | http://hdl.handle.net/11536/104401 |
| 專利國: | USA |
| 專利號碼: | 08673727 |
| 顯示於類別: | 專利資料 |

