标题: | Nickel nanocrystals with HfO2 blocking oxide for nonvolatile memory application |
作者: | Yang, F. M. Chang, T. C. Liu, P. T. Chen, U. S. Yeh, P. H. Yu, Y. C. Lin, J. Y. Sze, S. M. Lou, J. C. 电子工程学系及电子研究所 光电工程学系 显示科技研究所 Department of Electronics Engineering and Institute of Electronics Department of Photonics Institute of Display |
公开日期: | 28-五月-2007 |
摘要: | A distributed charge storage with Ni nanocrystals embedded in the SiO2 and HfO2 layer has been fabricated in this study. The mean size and aerial density of the Ni nanocrystals are estimated to be about 5 nm and 3.9x10(12)/cm(2), respectively. The nonvolatile memory device with Ni nanocrystals exhibits 1 V threshold voltage shift under 4 V write operation. The device has a long retention time with a small charge lose rate. Besides, the endurance of the memory device is not degraded up to 10(6) write/erase cycles. (C) 2007 American Institute of Physics. |
URI: | http://dx.doi.org/10.1063/1.2743926 http://hdl.handle.net/11536/10782 |
ISSN: | 0003-6951 |
DOI: | 10.1063/1.2743926 |
期刊: | APPLIED PHYSICS LETTERS |
Volume: | 90 |
Issue: | 22 |
结束页: | |
显示于类别: | Articles |
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