Micro actuated grating for multi-beam optical pickups

doi:10.1364/OE.15.001408

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DC 欄位	值	語言
dc.contributor.author	Lee, Chi-Hung	en_US
dc.contributor.author	Chiu, Yi	en_US
dc.contributor.author	Shieh, Han-Ping D.	en_US
dc.date.accessioned	2014-12-08T15:14:41Z	-
dc.date.available	2014-12-08T15:14:41Z	-
dc.date.issued	2007-02-19	en_US
dc.identifier.issn	1094-4087	en_US
dc.identifier.uri	http://dx.doi.org/10.1364/OE.15.001408	en_US
dc.identifier.uri	http://hdl.handle.net/11536/11120	-
dc.description.abstract	A stress-induced curved polysilicon actuator with a grating is achieved for the application of recordable optical pickups, which have been realized on a single silicon chip using a two-layer poly-silicon and one-layer silicon nitride micro-machining process. Three diffracted beams with equal intensity in each order from the grating were generated while applying a voltage to the actuator. The switching between the single beam and multiple beams can be applied for writing data and reading data in the disc, respectively. (c) 2007 Optical Society of America.	en_US
dc.language.iso	en_US	en_US
dc.title	Micro actuated grating for multi-beam optical pickups	en_US
dc.type	Article	en_US
dc.identifier.doi	10.1364/OE.15.001408	en_US
dc.identifier.journal	OPTICS EXPRESS	en_US
dc.citation.volume	15	en_US
dc.citation.issue	4	en_US
dc.citation.spage	1408	en_US
dc.citation.epage	1414	en_US
dc.contributor.department	電控工程研究所	zh_TW
dc.contributor.department	光電工程學系	zh_TW
dc.contributor.department	Institute of Electrical and Control Engineering	en_US
dc.contributor.department	Department of Photonics	en_US
dc.identifier.wosnumber	WOS:000244682500002	-
dc.citation.woscount	4	-
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