標題: High-Performance Single-Crystal-Like Strained-Silicon Nanowire Thin-Film Transistors via Continuous-Wave Laser Crystallization
作者: Chou, Chia-Hsin
Chan, Wei-Sheng
Lee, I-Che
Wang, Chao-Lung
Wu, Chun-Yu
Yang, Po-Yu
Liao, Chan-Yu
Wang, Kuang-Yu
Cheng, Huang-Chung
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
關鍵字: Continuous-wave laser crystallization (CLC);polycrystalline silicon (poly-Si);nanowire (NW);thermal stress;strained-silicon
公開日期: 1-Apr-2015
摘要: High-performance polycrystalline-silicon nanowire (NW) thin-film transistors (TFTs) have been demonstrated via continuous-wave laser crystallization (CLC) to exhibit the low subthreshold swing of 216 mV/decade and high ON/OFF ratio of 1.6x10(9). In addition, the thermal stress of similar to 800 MPa induced from the CLC process also contributed to the single-crystal-like silicon NW CLC TFTs to achieve an excellent field-effect mobility of up to 900 cm(2)V(-1)s(-1).
URI: http://dx.doi.org/10.1109/LED.2015.2405760
http://hdl.handle.net/11536/124472
ISSN: 0741-3106
DOI: 10.1109/LED.2015.2405760
期刊: IEEE ELECTRON DEVICE LETTERS
Volume: 36
起始頁: 348
結束頁: 350
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