標題: Polymer TSV Fabrication Scheme with Its Electrical and Reliability Test Vehicle
作者: Lee, Shih-Wei
Shih, Jian-Yu
Chuang, Ching-Te
Hwang, Wei
Chiou, Jin-Chern
Chen, Kuo-Hua
Chiu, Chi-Tsung
Chen, Kuan-Neng
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 2014
摘要: In this research, a novel process scheme for polymer TSV fabrication is proposed to solve the difficulty of polymer liner formation in TSV technology. The corresponding structure shows great manufacturability to replace traditional fabrication approach. In addition, Kelvin structure of the daisy chain is designed for evaluating electrical performance and reliability. Moreover, daisy chain with dummy TSV is designed to verify the impact of TSV pitch on TSV fabrication by using electrical measurement. The reliability tests include thermal cycling and humidity test to verify the quality of proposed polymer TSV design. Finally, a void-free polymer TSV with uniform liner formation is successfully fabricated and demonstrated.
URI: http://hdl.handle.net/11536/136337
ISBN: 978-1-4799-7727-7
期刊: 2014 9TH INTERNATIONAL MICROSYSTEMS, PACKAGING, ASSEMBLY AND CIRCUITS TECHNOLOGY CONFERENCE (IMPACT)
起始頁: 282
結束頁: 285
Appears in Collections:Conferences Paper