標題: Localized Joule Heating As a Mask-Free Technique for the Local Synthesis of ZnO Nanowires on Silicon Nanodevices
作者: Chen, C. C.
Lin, Y. S.
Sang, C. H.
Sheu, J. -T.
材料科學與工程學系奈米科技碩博班
Graduate Program of Nanotechnology , Department of Materials Science and Engineering
關鍵字: Nanobelt;nanowire;nanoparticle;ZnO;joule heating
公開日期: 1-十一月-2011
摘要: We report a mask-free technique for the local synthesis of ZnO nanowires (NWs) on polysilicon nanobelts and polysilicon NW devices. First, we used localized joule heating to generate a poly(methyl methacrylate) (PMMA) nanotemplate, allowing the rapid and self-aligned ablation of PMMA within a short period of time (ca. S mu s). Next, we used ion-beam sputtering to prepare an ultrathin Au film and a ZnO seed layer; a subsequent lift-off process left the seed layers selectively within the PMMA nanotemplate. Gold nanoparticles and ZnO NWs were formed selectively in the localized joule heating region.
URI: http://dx.doi.org/10.1021/nl202539m
http://hdl.handle.net/11536/14687
ISSN: 1530-6984
DOI: 10.1021/nl202539m
期刊: NANO LETTERS
Volume: 11
Issue: 11
起始頁: 4736
結束頁: 4741
顯示於類別:期刊論文


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