Low-V-t TaN/HfLaO n-MOSFETs Using Low-Temperature Formed Source-Drain Junctions

doi:10.1109/LED.2008.2009011

Title:	Low-V-t TaN/HfLaO n-MOSFETs Using Low-Temperature Formed Source-Drain Junctions
Authors:	Lin, S. H. Liu, S. L. Yeh, F. S. Chin, Albert 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics
Keywords:	HfLaO;low V-t;solid-phase diffusion (SPD)
Issue Date:	1-Jan-2009
Abstract:	We report low-threshold-voltage (V-t) TaN/HfLaO n-MOSFETs using solid-phase-diffusion (SPD)-formed junctions at a low temperature of 650 degrees C. The gate-first and self-aligned TaN/HflLaO n-MOSFETs using Ni/Sb SPID-formed source-drain junctions showed a low Vt of 0.16 V and a peak electron mobility of 187 cm(2)/V . s at a small 1.3-nm equivalent oxide thickness.
URI:	http://dx.doi.org/10.1109/LED.2008.2009011 http://hdl.handle.net/11536/149723
ISSN:	0741-3106
DOI:	10.1109/LED.2008.2009011
Journal:	IEEE ELECTRON DEVICE LETTERS
Volume:	30
Begin Page:	75
End Page:	77
Appears in Collections:	Articles