Anodic aluminum oxide as a template for CNT field emitters and AAO-CNT triode structure

Abstract

We have used anodic aluminum oxide (AAO) as the template to grow carbon nanotubes (CNTs) for the application of field-emission display technology. In order to obtain optimal field emission properties, we have tried to control the density and the length of the CNTs grown from AAO pore channels by tuning the growth time and the CH4 concentration of the precursor gas mixture. AAO pore channel arrays were grown in the triode structure, which was fabricated on silicon wafers by conventional integrated circuit processes.