標題: A FIBEROPTIC REFLECTIVE DISPLACEMENT MICROMETER
作者: KO, WH
CHANG, KM
HWANG, GJ
交大名義發表
National Chiao Tung University
關鍵字: DISPLACEMENT MICROMETERS;FIBER OPTICS
公開日期: 1-Jun-1995
摘要: A simple fiber-optic reflection displacement micrometer with a sensitivity of 200 mV mu m(-1) and a resolution as low as 0.01 mu m is reported with a theoretical explanation of the experimental results. The sensor consists of a pulsed LED light source and a pair (A and B) of identical receiving fibers and photodetectors that detects the light reflected from the surface being measured. The differential signal (A-B) of the detectors is proportional to the displacement of the surface relative to a null position. The light intensity variation of the source and the reflectance change of the surface are compensated when the (A-B) signal is divided by the sum (A+B). The resolution is limited by noise and interference (vibration of the base). A resolution of 0.01 mu m can be achieved at narrow signal bands (d.c, to 3 Hz) excluding the low-frequency noise and vibration. The range, sensitivity and non-linearity can be adjusted according to the theory. The micrometer offers the advantages of non-contact, no electrical interference, simplicity, low cost and portability. It can be used in medical experiments and laboratory instruments.
URI: http://hdl.handle.net/11536/1869
ISSN: 0924-4247
期刊: SENSORS AND ACTUATORS A-PHYSICAL
Volume: 49
Issue: 1-2
起始頁: 51
結束頁: 55
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