Selective SiO2-xFx growth with liquid-phase deposition for MEMS technology

Title:	Selective SiO2-xFx growth with liquid-phase deposition for MEMS technology
Authors:	Yeh, CF Lee, YC Su, JL 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics
Keywords:	low-stress;liquid phase deposition;LPD;SiO2-xFx;selective deposition
Issue Date:	1996
URI:	http://hdl.handle.net/11536/19813
ISBN:	0-8194-2277-0
Journal:	MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY II
Volume:	2879
Begin Page:	260
End Page:	265
Appears in Collections:	Conferences Paper