BOND-STRUCTURE CHANGES OF LIQUID-PHASE DEPOSITED OXIDE (SIO2-XFX) ON N2 ANNEALING

doi:10.1063/1.113603

標題:	BOND-STRUCTURE CHANGES OF LIQUID-PHASE DEPOSITED OXIDE (SIO2-XFX) ON N2 ANNEALING
作者:	YEH, CF CHEN, CL LUR, W YEN, PW 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics
公開日期:	20-二月-1995
URI:	http://dx.doi.org/10.1063/1.113603 http://hdl.handle.net/11536/2045
ISSN:	0003-6951
DOI:	10.1063/1.113603
期刊:	APPLIED PHYSICS LETTERS
Volume:	66
Issue:	8
起始頁:	938
結束頁:	940
顯示於類別：	期刊論文