標題: | High reflectivity distributed Bragg reflectors for 1.55 mu m VCSELs using InP/airgap |
作者: | Tsai, JY Lu, TC Wang, SC 光電工程學系 Department of Photonics |
關鍵字: | DBR;VCSEL;reflectivity |
公開日期: | 1-十月-2003 |
摘要: | A high reflecting InP/airgap distributed Bragg reflector (DBR) using InGaAs as sacrificial layers is demonstrated. The 3-pair InP/airgap DBR is formed by etching the InGaAs layers of the MOCVD grown InP/InGaAs structure using H2SO4 solution. A rigid and stable InP/airgap DBR with a peak reflectivity of 99.9% at 1.54 mum and a stopband width of about 200 nm is achieved. (C) 2003 Elsevier Ltd. All rights reserved. |
URI: | http://dx.doi.org/10.1016/S0038-1101(03)00144-8 http://hdl.handle.net/11536/27478 |
ISSN: | 0038-1101 |
DOI: | 10.1016/S0038-1101(03)00144-8 |
期刊: | SOLID-STATE ELECTRONICS |
Volume: | 47 |
Issue: | 10 |
起始頁: | 1825 |
結束頁: | 1828 |
顯示於類別: | 期刊論文 |