Assembly of Micro Mirrors on SOI Wafers Using SU-8 Mechanisms and One-Push Operation

標題:	Assembly of Micro Mirrors on SOI Wafers Using SU-8 Mechanisms and One-Push Operation
作者:	Chiu, Yi Huang, Wei-Zhi Wu, Jhong-Wei Chiou, Jin-Chem Shieh, Han-Ping D. 電控工程研究所 Institute of Electrical and Control Engineering
公開日期:	2008
摘要:	Micro mirrors are assembled on silicon-on-insulator wafers using one-push operation. The proposed technique can reduce the overall complexity of micro system assembly by using automated equipments. Novel SU-8 mechanisms are also demonstrated.
URI:	http://hdl.handle.net/11536/2941
ISBN:	978-1-4244-1917-3
期刊:	2008 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS
起始頁:	110
結束頁:	111
Appears in Collections:	Conferences Paper