標題: Formation of iridium nanocrystals with highly thermal stability for the applications of nonvolatile memory device with excellent trapping ability
作者: Wang, Terry Tai-Jui
Chu, Chang-Lung
Hsieh, Ing-Jar
Tseng, Wen-Shou
材料科學與工程學系
材料科學與工程學系奈米科技碩博班
Department of Materials Science and Engineering
Graduate Program of Nanotechnology , Department of Materials Science and Engineering
公開日期: 4-十月-2010
摘要: This paper presents the formation of iridium nanocrystals (Ir-NCs) embedded in SiO(2) matrix and it can be used for potential applications of nonvolatile memory devices. The NC formation is investigated by varying Ir film thickness; and the thermal agglomeration is also studied by applying various annealing temperatures and process time. The results of systematic characterization including capacitance-voltage, transmission electron microscopy, and x-ray photoelectron spectroscopy show that the high work-function (5.27 eV) metallic-NCs have a highly thermal stability (up to 900 degrees C) and the resulted Al/SiO(2)/Ir-NCs/SiO(2)/Si/Al stack can have a good retention ability and significant hysteresis window of 17.4 V. (C) 2010 American Institute of Physics. [doi:10.1063/1.3498049]
URI: http://dx.doi.org/10.1063/1.3498049
http://hdl.handle.net/11536/32084
ISSN: 0003-6951
DOI: 10.1063/1.3498049
期刊: APPLIED PHYSICS LETTERS
Volume: 97
Issue: 14
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