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CHARACTERISTICS OF TITANIUM SILICIDE FORMED BY SI/MO/TI TRILAYER METALLIZATION

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A1989T587400007.pdf (815.57 KB)

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1989-03-01

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10.1088/0268-1242/4/3/007

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http://dx.doi.org/10.1088/0268-1242/4/3/007
 https://ir.lib.nycu.edu.tw/handle/11536/4400

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期刊論文;;Articles

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