CHARACTERISTICS OF TITANIUM SILICIDE FORMED BY SI/MO/TI TRILAYER METALLIZATION

標題:	CHARACTERISTICS OF TITANIUM SILICIDE FORMED BY SI/MO/TI TRILAYER METALLIZATION
作者:	CHIOU, BS YANG, BJ CHANG, PH 交大名義發表電子物理學系 National Chiao Tung University Department of Electrophysics
公開日期:	1-Mar-1989
URI:	http://dx.doi.org/10.1088/0268-1242/4/3/007 http://hdl.handle.net/11536/4400
ISSN:	0268-1242
DOI:	10.1088/0268-1242/4/3/007
期刊:	SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume:	4
Issue:	3
起始頁:	177
結束頁:	183
Appears in Collections:	Articles

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