利用石英音叉於位移量測之研究

Abstract

石英音叉(quartz tuning fork, QTF)是一種壓電振盪器，運用在計時電路，其後被衍生運用在量測許多物理量上，如：力、加速度和位移等。而本論文主要研究如何延長石英音叉在位移上的量測範圍，實驗結果顯示本論文提出的的位移感測器之量測範圍可達到100贡m，且在此量測範圍最佳解析度可以達到300nm。

A quartz tuning fork is a kind of piezoelectric resonators. Quartz tuning forks can be modified as sensors to measure various properties, such as force, acceleration, displacement, and many other ones. A method to extend the measurable range of a quartz tuning fork based displacement sensor is devised in this paper. The experimental results demonstrate that the linear measurable range of the proposed displacement sensor is 100贡m, and the resolution is 300nm.