利用原子力顯微術實現快速原型

Abstract

本論文研究目標是利用原子力顯微鏡（Atomic Force Microscopy, AFM）之探針原理，以及紫外線光硬化膠與三軸壓電平台設計一小型的點針式快速原型系統；由於AFM之尺度小，解析度高，利用其針尖控制點膠，預計可以製作出微奈米尺度的元件。此外，由於光硬化膠的特性，可以快速的做出理想的元件。 為了控制並完成微快速原型系統，本研究使用Labview虛擬儀控軟體進行自動操作，成功完成單層的點陣圖像，並以幾種不同之控制變因瞭解膠點的大小高度之控制法則，經實驗後可知本系統可點出約半徑1μm至2μm的圓形至橢圓形膠點，並可利用參數控制沾點膠量多寡達成控制高度改變的目標。

This research’s object is used the principle of Atomic Force Microscope (AFM) probe, UV resins and a 3-axis piezoelectric stage to design the micro-size Rapid Prototyping (RP) system. Because of the AFM's high resolution and minimum size, we can use its tip to get the UV resins. By the UV properties of resins, we can make the nano-size particles possible. To control and achieve the micro-RP system, this research using the Labview control software to auto-control, and building the particle successfully. By changing different control variables, this research tries to find the resins points’ size and height controlled rules. After experiments, the micro-RP system can build the UV resins point with radius 1~2μm, what can change the points height and achieve this object.