EFFECT OF POLY-SI GETTERING SCHEME ON THE QUALITY OF SI EPITAXIAL FILM

標題:	EFFECT OF POLY-SI GETTERING SCHEME ON THE QUALITY OF SI EPITAXIAL FILM
作者:	CHEN, MC LEE, JY WU, HJ 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics
公開日期:	1981
URI:	http://hdl.handle.net/11536/5032
ISSN:	0013-4651
期刊:	JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume:	128
Issue:	3
起始頁:	C107
結束頁:	C107
Appears in Collections:	Articles