EFFECT OF POLY-SI GETTERING SCHEME ON THE QUALITY OF SI EPITAXIAL FILM

Title:	EFFECT OF POLY-SI GETTERING SCHEME ON THE QUALITY OF SI EPITAXIAL FILM
Authors:	CHEN, MC LEE, JY WU, HJ 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics
Issue Date:	1981
URI:	http://hdl.handle.net/11536/5032
ISSN:	0013-4651
Journal:	JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume:	128
Issue:	3
Begin Page:	C107
End Page:	C107
Appears in Collections:	Articles