PRE-EPITAXIAL AND POST-EPITAXIAL GETTERING OF STACKING-FAULTS IN SILICON

標題:	PRE-EPITAXIAL AND POST-EPITAXIAL GETTERING OF STACKING-FAULTS IN SILICON
作者:	CHEN, MC SILVESTRI, VJ 工學院 College of Engineering
公開日期:	1979
URI:	http://hdl.handle.net/11536/5106
ISSN:	0013-4651
期刊:	JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume:	126
Issue:	8
起始頁:	C368
結束頁:	C368
Appears in Collections:	Articles

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