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  1. You are Here:National Chiao Tung University Institutional Repository
  2. Publications
  3. Thesis

標題: 矽之微細加工技術及應用
Silicon micromachining technique and applications
作者: 翁炳國
謝正雄
光電工程學系
公開日期: 1986
URI: http://140.113.39.130/cdrfb3/record/nctu/#NT752124002
http://hdl.handle.net/11536/52812
Appears in Collections:Thesis


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