林郁欣

Abstract

本論文提出一新的大傾斜角以及可旋轉運動之靜電式微鏡面機構。支撐的圓柱製作在圓形微鏡面平板的下方，來增加有效的反射面積。 此微鏡面機構是利用厚膜光阻以及電鍍的技術來製作，製程分為兩部分進行。電極、支撐圓柱以及類似香菇頭的結構，被製作在一片矽晶片上，而微鏡面平板則被製作在另一片晶片上，將製作好的微鏡面平板結構從矽晶片上取下，兩部分進行組裝之後，微鏡面平板則呈傾斜的狀況。在微鏡面平板的下方鋪有十個電極，而微鏡面平板與電極間有二氧化矽當作絕緣層，防止導電，利用靜電力來驅動。 當電壓提供在微鏡面與一個電極時，微鏡面將被靜電力吸下，當依序切換下一個電極，則此微鏡面平板將做旋轉的運動，光線由上方入射時，則光線會因微鏡面的旋轉而反射到微鏡面的周圍，這樣的微鏡面機構，可以應用在主動式內視鏡以及其他光學的應用。

A novel micro electrostatic mechanism to rotate the micromirror with large inclined angle is designed and fabricated here. In order to have large effective reflecting area, the support structure is fabricated under the mirror plate. The micromirror is fabricated by thick photoresist and electroplarting techniques. The fabrication processes are conducted on two wafers. The structures of the electrodes, support and mushroom-like joint are fabricated on an n-type silicon wafer, the micromirror plate is manufactured on the other. The micromirror will tilt an inclined angle after assembly together. There are 10 electrodes under the mirror plate, and the isolated layer between the mirror plate and electrodes is the thin film of silicon dioxide. The micromirror is driven by electrostatic force. When a voltage is applied between the mirror plate and one of the stator poles, the mirror plate will be pulled down. By switching to the next stator pole, the mirror plate will roll around the stator poles. The light injected along the rotating axis to the mirror plate can be reflected to the periphery of the micromirror, when the mirror plate rotates a full circle. This kind of the micromirror can be used in the active endoscope or other optical applications.