集束型半導體製程設備模擬器之分析與物件導向設計

Abstract

本論文最主要的目的就是驗證集束型半導體製程設備控制器軟體。導入實體迴路模擬( Hardware in the loop)的概念，並使用此概念與UML工具設計一個以物件導向方式、即時模擬的集束型半導體製程設備模擬器（Cluster Tool Simulator）。除此之外，分析模擬器設計的所有考量因素，藉此縮短設計模擬器的時間，並使模擬器具備模擬正常反應、硬體失效、通訊失效的功能，進而能方便且正確的驗證控制器軟體。

This paper focuses on cluster tool controller software verification. Following the concept of hardware in the loop, we use the unified modeling language to design the object oriented in-time cluster tool simulator. In addition, we analyzed each of the design factors for the simulator, not only to save the design time, but also allow the simulator to have functions of normal response, hardware failure, and communication failure. This makes the simulator verify the controller software conveniently and correctly.