| 標題: | 高頻振動模式疊層壓電微致動元件材料與製程研究(II) Material and Process Development of Vibrational Multilayered Microactuator of Piezoelectric Thick Film(II) |
| 作者: | 陳三元 CHEN SAN-YUAN 國立交通大學材料科學與工程學系 |
| 公開日期: | 2000 |
| 官方說明文件#: | NSC89-2218-E009-049 |
| URI: | http://hdl.handle.net/11536/93485 https://www.grb.gov.tw/search/planDetail?id=597235&docId=112544 |
| Appears in Collections: | Research Plans |
- 壓電微致動器之研究 / 鄭文杰;Wen-Chieh Cheng;曾錦煥;Ching-Huan Tseng
- 壓電薄膜式微致動元件材料與製程研究(II) / 陳三元;CHEN SAN-YUAN
- PZT壓電微致動器之製程與鐵電特性研究 / 李俊翰;Jun Han Li;陳三元;San-Yuan Chan
- Performance improvement of an electrothermal microactuator fabricated using Ni-diamond nanocomposite / Tsai, LN;Shen, GR;Cheng, YT;Hsu, W
- 多自由度電熱式微致動器.的研究 / 吳青臺;Chientai Wu;徐文祥;Wensyang Hsu
- PZT壓電薄膜之懸臂樑微致動元件製程研究 / 林淑惠;Shu-Huie Lin;陳三元;Dr. San-Yuan Chen
- Design and fabrication of a three-dimensional long-stretch micro drive by electroplating / Wu, CT;Tai, WC;Hsu, CP;Hsu, W
- Magnetic analysis of a micromachined magnetic actuator using the finite element method / Ko, CH;Yang, JJ;Chiou, JC;Chen, SC;Kao, TH
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