寄生氧化層對具有原子層平坦之超薄氧化層的影響

標題:	寄生氧化層對具有原子層平坦之超薄氧化層的影響 The Effect of Native Oxide on Ultra-Thin Oxide (1.5-2.5nm) with Atomically Smooth Interface
作者:	荊鳳德 CHIN ALBERT 交通大學電子工程系
關鍵字:	寄生氧化層;超薄氧化層;遷移率;Native oxide;Ultra-thin oxide;Mobility
公開日期:	2000
官方說明文件#:	NSC89-2215-E009-071
URI:	http://hdl.handle.net/11536/93917 https://www.grb.gov.tw/search/planDetail?id=542127&docId=99589
Appears in Collections:	Research Plans

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