標題: Improved external quantum efficiency of GaN p-i-n photodiodes with a TiO2 roughened surface
作者: Lin, J. C.
Su, Y. K.
Chang, S. J.
Lan, W. H.
Huang, K. C.
Cheng, Y. C.
Lin, W. J.
電子物理學系
Department of Electrophysics
關鍵字: gallium nitride (GaN);p-i-n;photodiodes (PDs);surface roughness;titanium dioxide (TiO2)
公開日期: 1-Jan-2008
摘要: Gallium nitride p-i-n ultraviolet photodiodes (PDs) with a titanium dioxide (TiO2) nano-particles roughened surface have been fabricated. It was found that the responsivity and external quantum efficiency can be improved 60% on the surface roughened PDs. It was also found that light absorption can be enhanced from various incident angles by the TiO2 roughened surface. Furthermore, the high detectivity of 9.2 x 10(1.3) cm.Hz(1/2).W-1 can be achieved from the PD with a rough surface.
URI: http://dx.doi.org/10.1109/LPT.2007.915620
http://hdl.handle.net/11536/9879
ISSN: 1041-1135
DOI: 10.1109/LPT.2007.915620
期刊: IEEE PHOTONICS TECHNOLOGY LETTERS
Volume: 20
Issue: 1-4
起始頁: 285
結束頁: 287
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