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20093D 65nm CMOS with 320 degrees C Microwave Dopant ActivationLee, Yao-Jen; Lu, Yu-Lun; Hsueh, Fu-Kuo; Huang, Kuo-Chin; Wan, Chia-Chen; Cheng, Tz-Yen; Han, Ming-Hung; Kowalski, Jeff M.; Kowalski, Jeff E.; Heh, Dawei; Chuang, Hsi-Ta; Li, Yiming; Chao, Tien-Sheng; Wu, Ching-Yi; Yang, Fu-Liang; 電子物理學系; 電子工程學系及電子研究所; 電信工程研究所; Department of Electrophysics; Department of Electronics Engineering and Institute of Electronics; Institute of Communications Engineering
2011High Tensile Stress with Minimal Dopant Diffusion by Low Temperature Microwave AnnealLee, Yao-Jen; Lu, Yu-Lun; Mu, Zheng-Chang; Hsueh, Fu-Kuo; Chao, Tien-Sheng; Wu, Ching-Yi; 電子物理學系; Department of Electrophysics
1-三月-2014Low-Temperature Microwave Annealing Processes for Future IC Fabrication-A ReviewLee, Yao-Jen; Cho, Ta-Chun; Chuang, Shang-Shiun; Hsueh, Fu-Kuo; Lu, Yu-Lun; Sung, Po-Jung; Chen, Hsiu-Chih; Current, Michael I.; Tseng, Tseung-Yuen; Chao, Tien-Sheng; Hu, Chenming; Yang, Fu-Liang; 電子物理學系; 電子工程學系及電子研究所; Department of Electrophysics; Department of Electronics Engineering and Institute of Electronics
2013Microwave Annealing of Phosphorus and Cluster Carbon Implanted (100) and (110) SiCho, Ta-Chun; Lu, Yu-Lun; Yao, Jie-Yi; Lee, Yao-Jen; Sekar, Karuppanan; Tokoro, Nobuhiro; Onoda, Hiroshi; Krull, Wade; Current, Michael I.; Chao, Tien-Sheng; 電子物理學系; Department of Electrophysics
1-五月-2010Nanoscale p-MOS Thin-Film Transistor With TiN Gate Electrode Fabricated by Low-Temperature Microwave Dopant ActivationLu, Yu-Lun; Hsueh, Fu-Kuo; Huang, Kuo-Ching; Cheng, Tz-Yen; Kowalski, Jeff M.; Kowalski, Jeff E.; Lee, Yao-Jen; Chao, Tien-Sheng; Wu, Ching-Yi; 電子物理學系; Department of Electrophysics
1-六月-2012Novel 2-Bit/Cell Wrapped-Select-Gate SONOS TFT Memory Using Source-Side Injection for NOR-Type Flash ArrayWang, Kuan-Ti; Hsueh, Fang-Chang; Lu, Yu-Lun; Chiang, Tsung-Yu; Wu, Yi-Hong; Liao, Chia-Chun; Yen, Li-Chen; Chao, Tien-Sheng; 電子物理學系; Department of Electrophysics
1-十一月-2009Physical Mechanism of High-Programming-Efficiency Dynamic-Threshold Source-Side Injection in Wrapped-Select-Gate SONOS for NOR-Type Flash MemoryWang, Kuan-Ti; Chao, Tien-Sheng; Chiang, Tsung-Yu; Wu, Woei-Cherng; Kuo, Po-Yi; Wu, Yi-Hong; Lu, Yu-Lun; Liao, Chia-Chun; Yang, Wen-Luh; Lee, Chien-Hsing; Hsieh, Tsung-Min; Liou, Jhyy-Cheng; Wang, Shen-De; Chen, Tzu-Ping; Chen, Chien-Hung; Lin, Chih-Hung; Chen, Hwi-Huang; 電子物理學系; Department of Electrophysics
2012Simultaneous Activation and Crystallization by Low-Temperature Microwave Annealing for Improved Quality of Amorphous Silicon Thin-Film TransistorsLu, Yu-Lun; Lee, Yao-Jen; Chao, Tien-Sheng; 電子物理學系; Department of Electrophysics
2011低溫微波退火應用之研究呂侑倫; Lu, Yu-Lun; 趙天生; 李耀仁; Chao, Tien-Sheng; Lee, Yao-Jen; 電子物理系所
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