低介電常數材料應用於極大型積體電路製程與材料特性分析

標題:	低介電常數材料應用於極大型積體電路製程與材料特性分析 The Application of Low Dielectric Materials in ULSI Process and Analysis of Material Characteristics
作者:	周立人交通大學電子工程研究所
關鍵字:	介電常數;極大型積體電路;材料特性;Dielectric constant;ULSI;Material characteristics
公開日期:	2000
官方說明文件#:	NSC89-2215-E009-050
URI:	http://hdl.handle.net/11536/102315 https://www.grb.gov.tw/search/planDetail?id=541944&docId=99538
Appears in Collections:	Research Plans

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