標題: Binary-phase micrograting and polarization beamsplitter for free-space micro-optical pickups
作者: Lee, Chi-Hung
Chiu, Yi
Shieh, Han-Ping D.
電控工程研究所
光電工程學系
顯示科技研究所
Institute of Electrical and Control Engineering
Department of Photonics
Institute of Display
關鍵字: binary-phase grating;polarization beamsplitter;diffraction efficiency ratio;silicon nitride;optical pickup
公開日期: 1-Aug-2007
摘要: A pop-up binary-phase micrograting and a pop-up micro polarization beamsplitter, for potential use in micro-optical pickups, have been realized on a single silicon chip using a two-layer polysilicon and one-layer silicon nitride micromachining process. In the case of the micrograting, a diffraction efficiency ratio between 4 and 10 can be achieved provided that the duty cycle is between 0.4 and 0.6 and the depth between 455 and 485 nm, respectively. For a grating designed for a diffraction ratio of 7, the measured ratio is 8.31. The polarization beamsplitter is a silicon nitride thin film placed at the Brewster angle. The transmittance of the TM mode was measured to be more than 98.5%, while the reflectance of the TE mode was 21.4%. (c) 2007 Society of Photo-Optical Instrumentation Engineers.
URI: http://dx.doi.org/10.1117/1.2769362
http://hdl.handle.net/11536/10474
ISSN: 0091-3286
DOI: 10.1117/1.2769362
期刊: OPTICAL ENGINEERING
Volume: 46
Issue: 8
結束頁: 
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