標題: | Binary-phase micrograting and polarization beamsplitter for free-space micro-optical pickups |
作者: | Lee, Chi-Hung Chiu, Yi Shieh, Han-Ping D. 電控工程研究所 光電工程學系 顯示科技研究所 Institute of Electrical and Control Engineering Department of Photonics Institute of Display |
關鍵字: | binary-phase grating;polarization beamsplitter;diffraction efficiency ratio;silicon nitride;optical pickup |
公開日期: | 1-八月-2007 |
摘要: | A pop-up binary-phase micrograting and a pop-up micro polarization beamsplitter, for potential use in micro-optical pickups, have been realized on a single silicon chip using a two-layer polysilicon and one-layer silicon nitride micromachining process. In the case of the micrograting, a diffraction efficiency ratio between 4 and 10 can be achieved provided that the duty cycle is between 0.4 and 0.6 and the depth between 455 and 485 nm, respectively. For a grating designed for a diffraction ratio of 7, the measured ratio is 8.31. The polarization beamsplitter is a silicon nitride thin film placed at the Brewster angle. The transmittance of the TM mode was measured to be more than 98.5%, while the reflectance of the TE mode was 21.4%. (c) 2007 Society of Photo-Optical Instrumentation Engineers. |
URI: | http://dx.doi.org/10.1117/1.2769362 http://hdl.handle.net/11536/10474 |
ISSN: | 0091-3286 |
DOI: | 10.1117/1.2769362 |
期刊: | OPTICAL ENGINEERING |
Volume: | 46 |
Issue: | 8 |
結束頁: | |
顯示於類別: | 期刊論文 |