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dc.contributor.authorWu YewChung Sermonen_US
dc.contributor.authorChen Yu-Chungen_US
dc.date.accessioned2014-12-16T06:15:02Z-
dc.date.available2014-12-16T06:15:02Z-
dc.date.issued2013-01-03en_US
dc.identifier.govdocH01L029/06zh_TW
dc.identifier.govdocH01L021/302zh_TW
dc.identifier.govdocH01L021/26zh_TW
dc.identifier.urihttp://hdl.handle.net/11536/105093-
dc.description.abstractThe present invention related to a method for manufacturing a semiconductor, comprising steps of: providing a growing substrate; forming on the growing substrate to have plural grooves; forming a semiconductor element layer on the growing substrate; and changing the temperature of the growing substrate and the semiconductor element layer so as to separate the semiconductor element layer from the growing substrate.zh_TW
dc.language.isozh_TWen_US
dc.titleMETHOD OF SEMICONDUCTOR MANUFACTURING PROCESSzh_TW
dc.typePatentsen_US
dc.citation.patentcountryUSAzh_TW
dc.citation.patentnumber20130001752zh_TW
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