半導體與光電製程設備通訊模組之研究與開發

Abstract

本論文主要目的在利用軟體工程上物件導向分析與設計(Object-Oriented Analysis/ Design, OOA/D)的方法，設計一套滿足半導體工業標準(SEMI Standard)的獨立介面通訊模組控制器(Independent-Interface SECS Communication Module Controller, i-SECS)軟體。研究重點在於利用統一塑模語言(UML)、設計模式(Design Patterns)等開發工具以物件導向觀念設計一個整合容易、擴充方便的獨立介面通訊模組軟體控制器架構，並以Java程式語言來實作，達到控制器跨平台操作的需求。論文中說明集束型半導體製程設備(Cluster Tools)與光電產業製程設備的硬體與軟體架構，同時介紹有關通訊介面的規範以及獨立介面通訊模組所應具備的功能，最後並以實驗室內現有的集束型半導體製程設備來驗證所實作出來的獨立介面通訊模組控制器，此通訊模組可以整合於集束型製程設備中亦可單機獨立操作測試機台通訊。

In this thesis, we use Object-Oriented Analysis/Design (OOA/D) method to develop an Independent-Interface SECS Communication Module Controller (i-SECS) that conforms to SEMI standard. The main point is to use Unified Modeling Language (UML) and Design Patterns to develop a flexible and reusable software architecture, where the UML is adopted to analyze/design the controller, and Java programming language is used to implement i-SECS controller. In the presentation flow of the thesis, we will introduce cluster tools, photoelectric process equipments, communication interface and the capabilities of i-SECS. Finally, we link i-SECS controller to cluster tools in our Laboratory to test its capacity and performance, and the results are presented as well. The developed SECS communication module can be integrated into cluster tools, and also run stand-along to test equipment communication.