Title: FLEXIBLE NON-VOLATILE MEMORY
Authors: LIU Po-Tsun
FAN Yang-Shun
Issue Date: 6-Mar-2014
Abstract: A manufacturing method for manufacturing a flexible non-volatile memory is provided. The manufacturing method comprises the steps outlined below. A flexible substrate is provided. A planarization layer is formed on the flexible substrate. A metal bottom electrode layer is deposited on the planarization layer. A mask is formed to define a plurality of patterns. An AZTO layer having a plurality of electrically independent AZTO cells is deposited on the metal bottom electrode layer corresponding to the patterns. A top electrode layer is deposited on the AZTO layer corresponding to the AZTO cells to form a plurality of non-volatile memory cells.
Gov't Doc #: H01L045/00
URI: http://hdl.handle.net/11536/104947
Patent Country: USA
Patent Number: 20140061569
Appears in Collections:Patents


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