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國立陽明交通大學機構典藏
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公開日期
標題
作者
1-十一月-1998
Application of plasma immersion ion implantation doping to low-temperature processed poly-Si TFT's
Yeh, CF
;
Chen, TJ
;
Liu, C
;
Shao, JQ
;
Cheung, NW
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
1-六月-1999
Application of selective liquid-phase deposition to fabricate contact holes without plasma damage
Yeh, CF
;
Liu, CH
;
Su, JL
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
1998
Applying selective liquid-phase deposition to create contact holes in plasma damage-free process
Yeh, CF
;
Liu, CH
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
1996
Approach to room temperature process - A novel thin liquid-phase deposited oxide
Yeh, CF
;
Lin, SS
;
交大名義發表
;
電子工程學系及電子研究所
;
National Chiao Tung University
;
Department of Electronics Engineering and Institute of Electronics
1-九月-1999
Characteristics of novel polysilicon oxide by anodic oxidation
Yeh, CF
;
Liu, JS
;
Chiang, MC
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
1-十月-2000
Characterization and reliability of lightly-doped-drain polysilicon thin-film transistors with oxide sidewall spacer formed by one-step selective liquid phase deposition
Shih, PS
;
Chang, TC
;
Huang, TY
;
Yeh, CF
;
Chang, CY
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
1-十二月-1995
Chemical mechanical polishing of PSG and BPSG dielectric films: The effect of phosphorus and boron concentration
Liu, CW
;
Dai, BT
;
Yeh, CF
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
1-一月-2000
Comprehensive investigation on fluorosilicate glass prepared by temperature-difference-based liquid-phase deposition
Yeh, CF
;
Lee, YC
;
Wu, KH
;
Su, YC
;
Lee, SC
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
15-九月-2003
Device transfer technology by backside etching (DTBE) for poly-Si thin-film transistors on glass/plastic substrate
Wang, SC
;
Yeh, CF
;
Huang, CK
;
Dai, YT
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
1997
Effect of processing temperature on polysilicon thin-film transistors with liquid-phase deposited oxide as gate insulator
Yeh, CF
;
Chen, TJ
;
Jeng, JN
;
交大名義發表
;
電子工程學系及電子研究所
;
National Chiao Tung University
;
Department of Electronics Engineering and Institute of Electronics
15-五月-2004
Effects of grain boundaries on performance and hot-carrier reliability of excimer-laser annealed polycrystalline silicon thin film transistors
Chen, TF
;
Yeh, CF
;
Lou, JC
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
15-十二月-1996
Effects of mechanical characteristics on the chemical-mechanical polishing of dielectric thin films
Tseng, WT
;
Liu, CW
;
Dai, BT
;
Yeh, CF
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
1-十月-1997
Effects of process temperature on polysilicon thin film transistors with liquid-phase deposited oxides as gate insulators
Yeh, CF
;
Chen, TJ
;
Jeng, JN
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
2005
Fabricating thin-film transistors on plastic substrates using spin etching and device transfer
Wang, SC
;
Yeh, CF
;
Hsu, CT
;
Lou, JC
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
2004
Fabrication of thin-film transistors on plastic substrates by spin etching and device transfer process
Wang, SC
;
Hsu, CT
;
Yeh, CF
;
Lou, JC
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
1998
Highly reliable liquid-phase deposited SiO2 with nitrous oxide plasma post-treatment for low temperature processed poly-Si TFT's
Yeh, CF
;
Chen, DC
;
Lu, CY
;
Liu, C
;
Lee, ST
;
Liu, CH
;
Chen, TJ
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
1-十月-2002
Highly reliable liquid-phase-deposited SiO2 with nitrous oxide plasma post-treatment for low-temperature-processed polysilicon thin film transistors
Yeh, CF
;
Chen, DCH
;
Lu, CY
;
Liu, C
;
Lee, ST
;
Liu, CH
;
Chen, TJ
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
1-五月-1999
Hydrogenation of polysilicon thin-film transistor in a planar inductive H-2/Ar discharge
Yeh, CF
;
Chen, TJ
;
Liu, C
;
Gudmundsson, JT
;
Lieberman, MA
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
15-五月-2004
Impact of air filter material on metal oxide semiconductor (MOS) device characteristics in HF vapor environment
Hsiao, CW
;
Lou, JC
;
Yeh, CF
;
Hsieh, CM
;
Lin, SJ
;
Kusumi, T
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
2002
Impact of airborne molecular contamination to nano-device performance
Yeh, CF
;
Hsiao, CW
;
Lin, SJ
;
Xie, ZM
;
Kusumi, T
;
Aomi, H
;
Kaneko, H
;
Da, BT
;
Tsai, MS
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics